HMPS-2060SP Microwave Plasma (CVD) System
Chengdu Newman-Hueray Microwave Technology Co., Ltd. is a high-tech enterprise specialising in the research and development of microwave energy, microwave plasma application technology and its equipment production with independent intellectual property rights. In recent years, the company has been for the Chinese Academy of Sciences, the Institute of Materials, Jilin University, Nanjing University, Sichuan University, Ningbo Crystal Diamond Company, Beijing Wold Company and other research institutes, well-known enterprises and foreign customers to provide nearly one hundred sets of MPCVD equipment, by virtue of the excellent performance of the products and high-quality service, the company has been widely recognised by the user and praise.
◆ Batch growth of high quality monocrystalline diamond and polycrystalline diamond.
◆ CVD preparation of many kinds of thin films, material surface treatment and modification, growth of low temperature oxides, etc.
◆ Third generation high stable solid state power source; up-fed cylindrical discharge chamber;
◆ Suitable for industrial production of optical, electronic, tool grade diamond film or single crystal, graphene, etc., material surface treatment, growth of low temperature oxides, etc.
◆ Advanced performance, safety, high reliability, good reproducibility, easy operation.
◆ Multi-parameter real-time monitoring, collecting and recording, PLC screen control, multiple interlock protection.
| （1） | Model | HMPS-2060SP |
| （2） | Power supply | AC380±10% V three-phase five-wire system 50Hz, rated input <10KVA |
| （3） | Microwave output power | 0.5~6kW continuously adjustable |
| （4） | Power stability | better than 2% |
| （5） | Ripple | ≤1% |
| （6） | Microwave frequency | 2450MHz±50MHz |
| （7） | Temperature measurement method | infrared 300~1400℃ |
| （8） | Ultimate vacuum degree | 6×10-6torr |
| （9） | Working pressure | 7torr~250torr |
| （10） | Sample table | Φ60mm |
| （11） | Axial adjustment range of the sample stage | 0-60mm |
| （12） | Working atmosphere | Five-way (customizable) |
| （13） | Microwave leakage value | ＜5mW/cm2 |
| （14） | Working environment temperature | 15-40℃, relative humidity ≤60%, no corrosive gas |
| （15） | Cooling water | ＞22L/Min |
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