HMPS-2150S Microwave Plasma CVD Equipment
Chengdu Newman-Hueray Microwave Technology Co., Ltd. is a high-tech enterprise specialising in the research and development of microwave energy, microwave plasma application technology and its equipment production with independent intellectual property rights. In recent years, the company has been for the Chinese Academy of Sciences, the Institute of Materials, Jilin University, Nanjing University, Sichuan University, Ningbo Crystal Diamond Company, Beijing Wold Company and other research institutes, well-known enterprises and foreign customers to provide nearly one hundred sets of MPCVD equipment, by virtue of the excellent performance of the products and high-quality service, the company has been widely recognised by the user and praise.
* New design of microwave reaction chamber with high power density.
* The product has a fast deposition rate, high deposition quality, and a deposition area of more than 3 inches.
* Switch type microwave power source, high stability of microwave power output.
* Advanced performance, safety, strong reliability, good reproducibility and easy operation.
* Multi-parameter real-time monitoring, acquisition and recording, PLC screen control, multiple interlock protection and alarm.
| （1） | Model | HMPS-2150S |
| （2） | Power supply | AC380±10% V three-phase five-wire system 50Hz, rated input <10KVA |
| （3） | Microwave output power | 0.5~6kW continuously adjustable |
| （4） | Power stability | better than 2% |
| （5） | Ripple | ≤1% |
| （6） | Microwave frequency | 2450MHz±50MHz |
| （7） | Temperature measurement method | infrared 300~1400℃ |
| （8） | Ultimate vacuum degree | 6×10-6torr |
| （9） | Working pressure | 7torr~250torr |
| （10） | Sample table | Φ60mm |
| （11） | Axial adjustment range of the sample stage | 0-60mm |
| （12） | Working atmosphere | Five-way (customizable) |
| （13） | Microwave leakage value | ＜5mW/cm2 |
| （14） | Working environment temperature | 15-40℃, relative humidity ≤60%, no corrosive gas |
| （15） | Cooling water | ＞22L/Min |
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