HMPS-2080SP Microwave Plasma CVD Equipment
Chengdu Newman-Hueray Microwave Technology Co., Ltd. is a high-tech enterprise specialising in the research and development of microwave energy, microwave plasma application technology and its equipment production with independent intellectual property rights. In recent years, the company has been for the Chinese Academy of Sciences, the Institute of Materials, Jilin University, Nanjing University, Sichuan University, Ningbo Crystal Diamond Company, Beijing Wold Company and other research institutes, well-known enterprises and foreign customers to provide nearly one hundred sets of MPCVD equipment, by virtue of the excellent performance of the products and high-quality service, the company has been widely recognised by the user and praise.
* Bulk growth of high-quality single crystal diamond and polycrystalline diamond.
* CVD preparation of various thin films, surface treatment and modification of materials, growth of low-temperature oxides, etc.
* It is suitable for the industrial production of optics, electronics, tool-grade diamond film or single crystal, graphene, etc., material surface treatment, low-temperature oxide growth, etc.
| （1） | Model | HMPS-2080SP |
| （2） | Power supply | AC380±10% V three-phase five-wire system 50Hz, rated input <10KVA |
| （3） | Microwave output power | 0.5~8kW continuously adjustable |
| （4） | Power stability | better than 1% |
| （5） | Ripple | ≤1% |
| （6） | Microwave frequency | 2450MHz±50MHz |
| （7） | Temperature measurement method | infrared 300~1400℃ |
| （8） | Ultimate vacuum | ≤3.7×10-3Torr |
| （9） | Working pressure | 5torr~225torr |
| （10） | Discharge zone | Φ≥70mm |
| （11） | uniform deposition zone | ≥68mm |
| （12） | Working atmosphere | H2 /CH4 /N2 /O2 or CO2 or Ar, expandable to 5 channels |
| （13） | Helium mass spectrometry vacuum leakage rate | ≤1.0×10-9Pa·m3/s； |
| （14） | Working environment temperature | 15-40℃, relative humidity ≤60%, no corrosive gas |
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