Product Overview

HMPS-2100SP Microwave Plasma CVD System

Chengdu Newman-Hueray  Microwave Technology Co., Ltd. is a high-tech enterprise with independent intellectual property rights, specializing in the research and development of microwave energy and microwave plasma application technologies, as well as the production of related equipment. The company has 22 years of experience in dedicated research on microwave plasma MPCVD systems. Up to now, it has provided hundreds of MPCVD devices to customers at home and abroad. By virtue of the excellent performance of its products and high-quality services, the company has gained extensive recognition and praise from users.

The HMPS-2100SP microwave plasma MPCVD system features fast deposition rates, high deposition quality, and a deposition area exceeding 80mm. It is suitable for the deposition of optical, electronic, tool-grade diamond films, single crystals, graphene, and other materials, as well as surface treatment of materials and the growth of low-temperature oxides.

Performance Characteristics

◆ Designed with the new generation  of large volume cylindrical cavity,  with orecision design and aimulation,to carry  high power ;

◆ Highly power,high stability solid-state power generator;  

◆ the discharge area diameter is up to  80 mm; the uniform deposition area diameter  ≥ 3 inch;  

◆ Imported high-precision MFC, high-reliability stable pressure control system

◆ Multiple safety interlocks, multiple adjustments, programmable lifting/rotation of the sample stage

◆ Multi-level permission management;


Technical Index

◆Microwave power 0.5~10kW continuously adjustable, stability 1%;

◆Microwave frequency: 2450MHz, stability 1%;

◆ Discharge area Φ≥100mm; uniform deposition area Φ≥80mm;

◆Working gas: H2/CH4/N2/CO2 or O2 or Ar;

◆ultimate vacuum degree: ≤3.7×10-3 Torr or ≤6×10-6 Torr  ; vacuum leakage rate: ≤ 5×10-10Pa-m3/s;

◆Working pressure: 5-226 Torr,±0.1 Torr;

◆ Infrared temperature measurement: 300℃-1400℃ single color or 600~1800℃ (two-colour);

◆ PLC and 15-inch touch screen multi-parameter automatic control.

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CONTACT US

    Add: Building B17, No.777, Section 4, Huafu Avenue, Shuangliu District, Chengdu, China
    Tel:028-85964177
    Email:minhong.wan@wattsine.com

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