HMPS-2120S Microwave Plasma CVD System

Chengdu Newman-Hueray Microwave Technology Co., Ltd. is a high-tech enterprise specialising in the research and development of microwave energy, microwave plasma application technology and its equipment production with independent intellectual property rights. In recent years, the company has been for the Chinese Academy of Sciences, the Institute of Materials, Jilin University, Nanjing University, Sichuan University, Ningbo Crystal Diamond Company, Beijing Wold Company and other research institutes, well-known enterprises and foreign customers to provide nearly one hundred sets of MPCVD equipment, by virtue of the excellent performance of the products and high-quality service, the company has been widely recognised by the user and praise.

Performance Characteristics

High microwave power capacity and high power density;

◆ Large deposition area, fast rate and high quality;

◆ Safe and reliable, meeting the industrial production operation of monocrystalline and polycrystalline diamond;

◆Third generation high stable solid state power source, new type down-feed large volume disc discharge working chamber;

Technical Index

◆Microwave power 0.5~12kW continuously adjustable, stability 1%;

◆ Discharge area Φ≥100mm; uniform deposition area Φ≥75mm;

◆Working gas: H2/CH4/N2/CO2 or O2 or Ar;

◆Limit vacuum: 6×10-4Pa; vacuum leakage rate: 10-9Pa-m3/s;

◆Working pressure: 0.1~30kPa; automatic control;

◆ Infrared temperature measurement: 600~1800℃ (two-colour);

◆ PLC and 15-inch touch screen multi-parameter automatic control.

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