What fields and industries can MPCVD equipment be used in?
The growth and deposition of diamond, as we know it, cannot be separated from MPCVD equipment, because MPCVD equipment is required to obtain high quality diamond films.MPCVD equipment has no internal electrodes in the resonance chamber, which avoids contamination from electrode discharges. Moreover, it operates in a wide range of air pressure, and the plasma generated has the advantages of high density, large area, high stability and does not contact with the wall of the vacuum apparatus, so that the contamination of the film by the wall can be avoided.
In the previous industry, people usually used to use the known magnetron power source in MPCVD equipment system, of course, that is when there is no better replacement found, but nowadays it is different, with the rapid development of the technology, the use of solid-state RF microwave power source to replace the magnetron scheme in the MPCVD equipment system has become a new trend. Therefore, the MPCVD method has become one of the relatively promising methods for the deposition of high quality diamond films with its unique advantages. And it is also very suitable for the deposition of optical, electronic and tool-grade diamond films or single crystals and graphene, as well as in the surface treatment of materials and the growth of low-temperature oxides.
MPCVD equipment can also grow graphene directly on the target substrate material, such as between 240 ~ 700 ℃, MPCVD equipment can be prepared on different substrate materials of high quality graphene, thus making graphene in the field of microelectronics applications have been further expanded.
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