Hueray microwave 75kW large size High-Power MPCVD equipment passes expert review

July 8, 2025, Hueray organized the MPCVD equipment review meeting, specially invited from the University of Science and Technology of China, Ningbo Institute of Materials, Sichuan University, University of Electronic Science and Technology and other industry celebrities as the appraisal of this appraisal review meeting of the assessment experts.

At the review meeting,CEO of Hueray extended a warm welcome and sincere thanks to the experts.Provided a detailed introduction to the development background, key technologies and innovations, international and domestic technical comparisons, industrialization of the results, and promotion and application of Hueray's "High-Power MPCVD Equipment." After the meeting, the audit experts visited the productionfactoryof MPCVD equipment.

Following the on-site testing of  MPCVD equipment, the experts unanimously concluded that Hueray's "High-Power MPCVD Equipment" meets the product standards and requirements. They agreed to pass the product review and gave it high recognition.

01.Precision Design and Simulation of the Reaction Chamber

Experts have indicated that the reaction chamber is one of the core components of diamond growth equipment. As a large-size, high-power functional diamond growth system, Hueray's MPCVD equipment has introduced innovations in the design of the reaction chamber. It employs a new-generation large-volume, bottom-fed, large annular reaction chamber, which can accommodate ultra-high microwave power capacities. The TM02 microwave discharge mode is utilized to optimize the distribution of the plasma, resulting in more uniform crystal growth. The effective diamond deposition area can reach up to 12 inches. Additionally, the reaction chamber features an extremely low vacuum leak rate, at a semiconductor level, with a helium mass spectrometry leak rate of≤1×10⁻¹⁰Pa·m³/s, which meets the requirements for the preparation of high-quality diamond materials.

02.High Efficiency and Stability in Operation

When operating at high power, the stability of the equipment is a crucial indicator of its performance. Hueray's MPCVD equipmentuse solid-state power generatoras the microwave energy source, with a power output of 75 kW and a frequency of 915 MHz. Compared to traditional magnetron, the solid-state powergenerator offers higher stability in power output and enhanced safety.

During the diamond growth process, different growth stages require varying power levels to maintain stable plasma conditions. The MPCVD equipment based on the solid-state power generator can precisely adjust the power output according to the growth requirements, ensuring that the plasma energy density remains in an optimal state. This means that, with the same energy input, Hueray's MPCVD equipment can generate more effective energy for diamond growth.

The equipment features high control precision and supports both automatic and manual modes, enabling automatic temperature and pressure control, as well as one-click automated process recipe-driven operations. It also includes fault alarms for over-temperature, over-current, and over-pressure, along with multiple safety interlock protections.

Experts believe that this high efficiency and stability in high-power operation is a significant advantage ofHueray, meeting the demands for large-size, high-efficiency, and stable production of large-size functional diamond materials.

03.High-End Application Demands

With the advancement of technology, the demand for large-size, high-quality diamonds in high-end fields is increasing. The diamonds grown by Hueray's MPCVD equipment can meet these demands well. The equipment is suitable for the preparation of nanocrystalline and ultra-fine nanocrystalline diamonds, optical-grade diamond windows, and CVD single-crystal diamond heat sinks of 6 inches and above.

In the electronics field, large-size diamonds can serve as high-performance thermal management materials to address the heat dissipation issues of high-power electronic devices. The diamonds grown by Hueray have a high thermal conductivity, which can reach up to 2000 W/m·K, several times higher than that of traditional thermal management materials.

In the field of super-hard materials, large-size diamond tools can be used for machining large-scale, high-hardness aerospace components. Hueray's MPCVD equipment makes it possible to produce such high-quality large-size diamond tools, thereby improving machining efficiency and precision while reducing machining costs.

Experts believe that the high compatibility of Hueray's 915 MHz/75 kW MPCVD equipment with high-end application demands will help drive technological progress in related industries.

 In this review,Hueray's 915 MHz/75 kW MPCVD equipment has garnered the recognition of experts, thanks to its innovative technological features, outstanding performance and quality, and strong alignment with industry needs. This not only lays a solid foundation for the promotion and application of our equipment but also provides robust support for the development of large-size, high-power diamonds in a broader range of fields. It is expected to play an even more significant role in future technological and industrial advancements.