915MHz/75kw MPCVD system: A Technological Breakthrough in Large-Scale Diamond Growth

The HMPS-9750S is a newly launched high-performance microwave plasma chemical vapour deposition system (MPCVD equipment) by Newman and Hueray Microwave. Integrating multiple advanced technologies and proprietary innovations, it demonstrates significant product advantages across several key dimensions, particularly suited for the preparation of large-sized, high-quality diamond films and single-crystal materials.

I. Proprietary Intellectual Property and Innovative Design

The HMPS-9750S MPCVD system is entirely self-developed by Newman and Hueray, possessing comprehensive proprietary intellectual property rights. This ensures technological autonomy and continuous iterative capability. It employs a next-generation, large-volume, low-mode, large-scale annular reaction chamber. Through precision design and simulation optimisation, it can accommodate ultra-high-power microwave input, laying a robust foundation for achieving uniform, large-area diamond deposition.

II. Exceptional Plasma Performance and Deposition Efficiency

The HMPS-9750S MPCVD system supports TM02 dual-mode discharge configurations, achieving a discharge zone diameter exceeding 240mm with a uniform deposition area of no less than 200mm. This provides critical process conditions for high-quality fabrication of large-size nanocrystalline and ultrafine nanocrystalline diamond, optical-grade CVD diamond windows, and high thermal conductivity single-crystal diamond heat sinks. The unique chamber design positions the plasma away from the quartz window. Combined with air-cooled heat dissipation, this effectively protects the quartz window from contamination and thermal damage, enhancing system stability and service life.

III. High-Power, High-Stability Microwave System

The HMPS-9750S MPCVD system incorporates a high-power, high-stability solid-state microwave source or switched microwave power source operating at 915 MHz. It delivers a maximum output power of 75 kW, continuously adjustable within the 10%-100% range, with power stability exceeding ±1%. Combined with a manual three-pin adapter and shorting piston, this enables precise microwave energy control, ensuring high process repeatability and reliability. IV. Precise and Controllable Process Environment

The vacuum system of the HMPS-9750S MPCVD system employs a combination of two-stage rotary vane pumps, molecular pumps, and Roots pumps, achieving an ultra-low ultimate vacuum of ≤6×10⁻⁶ Torr. Working pressure is precisely controllable within the range of 8–220 Torr, with stability maintained at ±0.1 Torr, providing a clean and stable vacuum environment for different diamond growth stages. Imported high-precision mass flow controllers and a reliable pressure control system further ensure the accuracy and stability of process gas ratios and pressures. V. Intelligent Control and Safety Assurance

The system integrates PLC and intelligent software control, supporting both manual and automatic operation modes to facilitate process development and batch production. Multiple safety interlock mechanisms and hierarchical access control ensure comprehensive protection for both equipment and personnel, meeting the stringent reliability and safety requirements of industrial production. VI. Efficient Cooling and Sample Handling Capabilities

The sample stage employs a large-area oxygen-free copper water-cooling design (diameter ≥600mm), with an optional molybdenum-based stage (diameter ≥200mm). Coupled with a deionised water cooling system, this ensures uniform and stable substrate temperature during high-power, extended operation. A dual-colour/single-colour temperature measurement system covers the range from 300°C to 1475°C, meeting the precise temperature monitoring demands of diamond growth.

In summary, the Newman and Hueray HMPS-9750S MPCVD system demonstrates formidable technical advantages and application potential in advanced diamond material R&D and industrialisation. Its proprietary innovative design, robust process capabilities, precision control systems, and comprehensive safety features establish it as an ideal platform for producing large-scale, high-performance CVD diamond products.