Principles and Advantages of Microwave Plasma CVD Equipment

I. Principle of Microwave Plasma CVD Equipment

Microwave plasma chemical vapour deposition (CVD) equipment is based on the key mechanism of plasma generation by microwaves in the growth of diamond. A microwave generator converts electrical energy into microwave energy, which, when directed into the reaction chamber, generates plasma in a specific gas environment (usually containing hydrogen and carbon-containing gases such as methane). This plasma is so active that it breaks down the carbon-containing gases, allowing carbon atoms to be deposited and crystallised on a substrate, gradually growing into a diamond structure. Like a magical architect, the plasma carefully builds tiny carbon atoms into brilliant diamond edifices.

In this process, microwave frequency plays an important role. Generally used microwave frequencies (e.g. 2.45GHz or 915MHz) can effectively excite the gas molecules and generate plasma with sufficient energy. At the same time, parameters such as pressure and gas flow inside the reaction chamber need to be precisely controlled to ensure the stability of the plasma and the proper conditions for carbon atom deposition.

II. Analysis of the advantages of microwave plasma CVD equipment

Compared with other diamond growth technologies, microwave plasma CVD equipment has unique advantages.

Firstly, the growth temperature is low, it can grow diamond under relatively mild temperature conditions, which is very critical for some substrate materials that cannot withstand high temperature. For example, when growing diamond coatings on the surface of some special electronic components, the lower growth temperature will not cause damage to the component performance.

Second, microwave plasma CVD equipment is capable of growing high quality diamond. Because the plasma generated by microwaves is highly homogeneous, the deposition of carbon atoms on the substrate is also more uniform, resulting in structurally complete diamond with fewer crystal defects. Studies have shown that diamond grown with this device is superior to diamond grown by some conventional methods in terms of hardness, transparency and other indicators. Microwave Plasma Chemical Vapour Deposition (CVD) Equipment: A Journey to Diamonds in the Gas State